Controlled Evaporation and Vapour Delivery
Bronkhorst bespoke Controlled Evaporation & Mixing (CEM) and Vapour Delivery Modules(VDM)
The CEM-System (Controlled Evaporation and Mixing) is an innovative Liquid Delivery System (LDS) that can be applied for atmospheric or vacuum processes. The vapor generation system consists of a (thermal or Coriolis) liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device. Designed specifically for your process this system offers state of the art control of Vapour production and delivery.
Based on the above CEM-technology Bronkhorst designed a new series of Vapor Delivery Modules. These compact sub-systems incorporate the components of the CEM-System and more! Besides gas and liquid flow controllers and the temperature controlled evaporator, the VDM-Series feature integrated power supply with display (1.8″ TFT) and control functions. As an option, the unit offers local or remote trace heating temperature control.
The compact plug and work module can generate (saturated) vapor flows within the range of 100 mln/min up to 10 ln/min. It can be applied for atmospheric or vacuum processes and is capable of evaporating mixtures and even solids, dissolved in solvents.
Features include :
- Accurately controlled gas/liquid mixture (mass flow)
- Fast response
- High reproducibility
- Handles water, solvents, liquid mixtures
- Very stable vapor flow
- Flexible selection of gas/liquid ratio
- Lower working temperature than conventional systems
Applications
- CVD (Chemical Vapor Deposition), e.g. for hardening, thin film coating or planarization processes
- Testing/calibration of analyzers with reference gas vapor concentrations
- Toxic gas effects on protective clothing
- Analyzers with reference H2O vapor concentrations
- Humidification of fuels
- Anaesthetics
- Sorption experiments or processes in pharma or food applications
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